SAES Pure Gas Inc. Continues to see a growing market for their MicroTorr® Purifiers for purification of HCL gas.
San Luis Obispo, CA--(BUSINESS WIRE)— February 26, 2004--SAES Pure Gas Inc, a leading supplier of gas purification technology equipment to the semiconductor and other industries, today announced that a significant order has been placed for the ambient temperature point-of-use (POU) purifier developed specifically for HCL gas applications. The HCL purifier has been designed to remove moisture (H2O) from corrosive gases. This large wafer manufacturer tested the SAES purifier for over a year and found improvements in their process that significantly increased yield. There was also a noticeable reduction in the number of components in the gas stream that needed replacement due to corrosion. A lower cost of ownership was achieved through higher yields, less downtime and lower component replacement costs by simply installing a SAES MicroTorr® HCL purifier in-line with the HCL gas stream to remove moisture.
When moisture and HCL (or other corrosive gases such as BCL3, CL2, etc.) mix, the gas forms an acid causing corrosion and equipment failure in such parts as valves, MFCs, MFMs, pipes and other expensive components in the gas stream. In many cases the standard procedure is to replace these expensive components on a regular basis. As in the example of a HCL gas, any moisture in the gas will hydrolyze to form a hydrochloric acid and sometimes organic acids. The acid attacks the iron and other components that make up stainless steel causing pitting to occur. As the corrosion process continues, components begin to fail, and the acid formed and metals released are deposited back into the gas stream causing a significant yield loss and failure of the end product (i.e. the integrated circuit).
1 This occurs because an active-passive electrolytic cell is formed between the large cathodic (passive) area and the small anodic area under attack; the surrounding oxygen serves as a depolarizer, and pitting proceeds.
2 Solutions containing chlorides (such as hydrochloric acids) are especially detrimental because they promote formation of active-passive electrolytic cells. Acid chlorides in their higher-valence state are particularly severe, but any chloride in applicable concentration is a possible source of trouble.
By placing a SAES Pure Gas HCL POU purifier in the gas stream upstream of these components the moisture levels can be reduced and controlled down to the PPT by ranges eliminating moisture causing the corrosion. This results in a savings of expenses for production and laboratory environments with less downtime caused by failed components and a higher yield in the final product.
About the SAES Getters Group
Pioneering the development of the getter technology, SAES Getters Group is the world leader in a variety of scientific and industrial applications where stringent vacuum conditions or ultra high pure gases are required. For the last 60 years, its getter solutions have been supporting technological innovation in the information display and lamp industries, in ultra high vacuum systems, in a wide range of electron device-based applications, and in the vacuum thermal insulation.
The Group also holds a leading position in ultra pure gas handling for the semiconductor and other hi-tech markets:
SAES Pure Gas is a worldwide leading company in engineering and manufacturing of bulk and point-of-use gas purifiers and is emerging as a key player for the newest, cutting edge applications, such as DUV/EUV optics purge gas, CO2 cleaning and bulk ammonia purification. Starting year 2004, by leveraging on the core competence in special metallurgy and material science, SAES Getters Group expands its business in the advanced material niche markets, with the introduction of the optical crystal product line, for optoelectronic and high-power laser applications, and of the shape memory alloys, for actuators primarily used in the automotive industry.
A total production capacity distributed at 8 manufacturing plants spanning across 3 continents, a 16-facility sales & service network, over 1,000 employees allow the Group to combine multicultural skills and expertise to form a truly global enterprise.
SAES Getters is headquartered in Milan area of Italy, and holds manufacturing plants, sales and service facilities worldwide. SAES Getters has been listed on the Italian Stock Exchange Market since 1986.
1 Metals Handbook (Desk Edition) by the American Society for Metals, Copyright 1985. Section 15-17, On Stainless steel, corrosion effects in Hydrochloric Acid and Pitting Corrosion.
SAES Getters Group Contacts
PR Contact:
SAES Getters Group
Marina Perino
Group Marcom Manager
Phone: +39 02 9317 8267
Fax: +39 02 9317 8320
E-mail: Marina Perino |
SAES Pure Gas Inc.
Steve Wallace
Marketing Representative
Phone: +1 805 541 9299
Fax: +1 805 541 9399
E-mail: Steve Wallace | |