 |
|
Nitrogen Bulk Gas Purifier - PS8
|
|
|
The MegaTorr® MGT Series Nitrogen purifiers are enhanced, optimized designs providing sub-ppb performance in small footprints. SAES Pure Gas has drawn on years of experience in Ultra-High Purity (UHP) piping design, advanced process material analysis and state of the art integrated control systems to develop this family of purifiers to meet the needs of low capital cost, high reliability and high performance. The PS8 series uses dual adsorption processes designed specifically to provide ultra-high purity gas for semiconductor applications. Outlet impurity levels for CO, CO2, H2, H2O and O2 are reduced to below parts per billion (ppb) levels.
Adsorber vessels alternate between purify and regeneration modes, providing continuous purification in a single process to remove the impurities to sub ppb levels. Adsorber regeneration is accomplished by back-flushing with a mixture of purified process gas and low concentration hydrogen at an elevated temperature.
The PS8 platform can be manufactured to flow 15 Nm3/hr to 20,000 Nm3/hr. |
 |
|
STANDARD FEATURES
- Automated Microprocessor Controller
- HMI (Human Machine Interface)
- System Alarms
- Electric Gas Preheaters
- Closed-Loop Temperature Controls
- All Metal Cabinet with Doors
- Hydrogen Blending Station
CUSTOMER INTERFACE CONNECTIONS
- Alarm Relay - fail safe relay contacts allow remote detection of alarm condition.
- Remote Contact Shutdown - allows remote shutdown of the purifier.
OPTIONAL EQUIPMENT
- Inlet & Outlet Isolation Valves
- Mass flow meter with 4-20mA Output
- Inlet & Outlet Pressure Transducers
- Instrument Air Management System
- Air Cooled Heat Exchanger
- High Temperature Hardware Interlock
- Over Pressurization Safety Relief System
- Auto or Manual Bypass
- Particle Filter
- Separate Control Power
- MODBUS Data Communication Port
|
|
PS8 Performance |
| Gas Purified |
Impurities Removed |
Outlet Performance |
| N2 |
H2O, O2, CO, CO2, H2 |
< 1 ppb |
| Note: Purifiers are gas specific and should only be used for the gas indicated | |
|
|
PS8 Specifications |
| Model |
Maximum Flow (Nm3/hr) |
Average Power Consumption (kW) |
Maximum Pressure Drop (bar) |
Dimensions (cm) |
Weight (kg) |
| H |
W |
D |
| PS8-MGT10-N |
10 |
0.2 |
0.7 |
115 |
53 |
30 |
50 |
| PS8-MGS30-N |
30 |
0.3 |
0.7 |
168 |
100 |
50 |
150 |
| PS8-MGS60-N |
60 |
0.5 |
1 |
150 |
84 |
43 |
120 |
| PS8-MGS100-N |
100 |
0.5 |
1 |
160 |
80 |
64 |
300 |
| PS8-MGT200-N |
200 |
0.28 |
0.7 |
193 |
132 |
135 |
1500 |
| PS8-MGT300-N |
300 |
0.28 |
1 |
193 |
132 |
135 |
1500 |
| PS8-MGT400-N |
400 |
0.35 |
0.7 |
239 |
191 |
236 |
2300 |
| PS8-MGT500-N |
500 |
0.42 |
0.7 |
239 |
191 |
236 |
2300 |
| PS8-MGT600-N |
600 |
0.48 |
0.7 |
239 |
191 |
236 |
2300 |
| PS8-MGT700-N |
700 |
0.54 |
0.7 |
239 |
191 |
236 |
2300 |
| PS8-MGT800-N |
800 |
0.58 |
0.7 |
239 |
191 |
236 |
2300 |
| PS8-MGT1000-N |
1000 |
0.65 |
0.7 |
209 |
191 |
236 |
2300 |
| PS8-MGT1200-N |
1200 |
0.7 |
0.7 |
265 |
252 |
262 |
5217 |
| PS8-MGT1500-N |
1500 |
0.85 |
0.7 |
264 |
252 |
262 |
5217 |
| PS8-MGT1800-N |
1800 |
1 |
0.7 |
264 |
252 |
262 |
5217 |
| PS8-MGT2000-N |
2000 |
1.3 |
0.7 |
264 |
252 |
262 |
5500 |
| PS8-MGT2500-N |
2500 |
1.3 |
0.7 |
264 |
252 |
262 |
5557 |
| PS8-MGT3000-N |
3000 |
1.3 |
0.7 |
264 |
252 |
262 |
5557 |
| PS8-MGT4000-N |
4000 |
2.5 |
0.7 |
267 |
252 |
467 |
10433 |
| PS8-MGT5000-N |
5000 |
2.5 |
0.7 |
267 |
252 |
467 |
10433 |
| PS8-MGT6000-N |
6000 |
2.5 |
0.8 |
267 |
252 |
467 |
10433 |
| PS8-MGT7000-N |
7000 |
3.8 |
0.7 |
267 |
252 |
467 |
11567 |
| PS8-MGT8000-N |
8000 |
3.8 |
0.7 |
267 |
252 |
467 |
11567 |
| PS8-MGT9000-N |
9000 |
3.8 |
1 |
267 |
252 |
467 |
11567 |
| PS8-MGT10000-N |
10000 |
3.8 |
1 |
267 |
252 |
467 |
11567 |
| Other flow rates available, please consult the factory for details. |
|
|
 |
 |
|
PS8-MGT3000 Nitrogen Purifier |
PS8-MGT10 Nitrogen Purifier |
|
 |
 |
|
PS8-MGS30 Nitrogen Purifier |
PS8-MGT10000 Nitrogen Purifier |
|
|
|
|
|
| Bulk Gas |
|
| Auto-Regenerable |
| CDA |
|
 Removes H2O, CO2, TOC, Acids, Bases, Refractory, Compounds
|
|
|
Nitrogen |
| Removes H2O, CO, CO2, O2, H2 |
| Removes H2O, CO, CO2, O2, H2, CH4 |
|
|
Rare Gas |
|
Removes H2O, CO, CO2, O2, H2, CH4, N2 |
|
|
Hydrogen |
|
Removes H2O, CO, CO2, O2, NMHC |
| Removes H2O, CO, CO2, O2, NMHC, CH4, N2 [5N Quality Gas] |
| Removes H2O, CO, CO2, O2, NMHC, CH4, N2 [6N Quality Gas] |
|
|
Oxygen |
|
Removes H2O, CO, CO2, H2, CH4 |
|
| Ammonia |
|
Removes H2O, O2 |
|
|
Factory Regenerable |
|
CDA, Nitrogen, Rare Gas, Hydrogen, Oxygen |
|
Removes H2O, CO, CO2, O2, H2 |
|
| OPAL Outdoor Enclosure |
|
|
|
|
|