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	Argon and Helium Bulk Gas Purifier - PS5  PS5 RARE GAS PURIFIER The PS5 MegaTorr Rare Gas purifiers are heated getter-based purifiers designed specifically to provide ultra-high purity (UHP) gas for semiconductor applications.   The patented getter alloy operates at elevated temperatures to remove impurities by forming irreversible chemical bonds. Impurities removed will not be released under any circumstances when the purifier is operated within specification. Outlet impurity levels for O2, H2O, CO, CO2, H2, CH4 and N2 are reduced to parts per billion concentrations.   Downstream of the heated getter columns, Hydrogen impurities are removed by a patented secondary ambient temperature getter cartridge, known as the Hydrogen Removal Unit (HRU).    Fully automatic operation is provided standard with the microprocessor-based controller and full instrumentation. Multi-tiered fault protection keeps gas flowing while alerting the operator of any problems. Long getter life is achieved through efficient getter bed designs, which safely optimize operating temperature, bed dimensions and flow rates. For the PS5 platform only electrical power and pneumatic air supply is needed to operate the purifier.   The PS5 can be installed into small areas because of the compact design and front/rear access (zero-side clearance acceptable). The PS5 comes standard with GettSafe™ – the state-of-the-art solution to fast-response thermal protection. GettSafe quickly detects excessive heat in the getter column, and the built-in discrete hardware interlock takes action to isolate the purifier.        FEATURES STANDARD FEATURES Fully Automated Microprocessor Controller Human Machine Interface (HMI) High Temperature Hardware Interlock GettSafe™ high temperature safety shutdown system Metal 0.003µm Particle Filter Inlet and Outlet sample ports with isolation valves Instrument Air Pressure Switch Automatic Bypass Gas to Gas Heat Exchanger Electric Gas Preheater System Air Cooled Heat Exchanger All Metal cabinet with doors Alarm relay, life status indicator relay, remote contact shutdown, gas relay Relief valve CE Marking OPTIONAL EQUIPMENT Inlet and Outlet isolation valves Inlet mass flow meter Instrument Air Management System Color Human Machine Interface Manual bypass valve Pneumatically actuated manual bypass valve Separate control power Emergency off button Uninterruptible Power Supply Ground fault protection MODBUS data communication port   PS5 Performance Gases Purified Impurities Removed Outlet Performance He, Ar H2O, O2, CO, CO2, H2, N2, CH4 < 1 ppb Note: Purifiers are gas specific and should only be used for the gas indicated   PS5 Specifications  Model Maximum Flow (Nm3/hr) Average Power Consumption (kW) Maximum Pressure Drop (bar) Dimensions (cm) Weight (kg) H W D  PS5-MGT15-R 15 1 0.7 185 61 89 204  PS5-MGT30-R 30 1.5 0.7 185 61 89 204  PS5-MGT50-R 50 2.5 1 185 61 89 240  PS5-MGT100-R 100 5 1 185 120 89 500  PS5-MGT150-R 150 7.5 1 185 180 89 750     Point of Use See all Point Of Use Products  Bulk Gas Auto-Regenerable CDA  Removes H2O, CO2, TOC, Acids, Bases, Refractory, Compounds Nitrogen  Removes H2O, CO, CO2, O2, H2  Removes H2O, CO, CO2, O2, H2, CH4 Rare Gas  Removes H2O, CO, CO2, O2, H2, CH4, N2 Hydrogen  Removes H2O, CO, CO2, O2, NMHC  Removes H2O, CO, CO2, O2, NMHC, CH4, N2 [5N Quality Gas]  Removes H2O, CO, CO2, O2, NMHC, CH4, N2 [6N Quality Gas] Oxygen  Removes H2O, CO, CO2, H2, CH4 Ammonia  Removes H2O, O2 Factory Regenerable CDA, Nitrogen, Rare Gas, Hydrogen, Oxygen  Removes H2O, CO, CO2, O2, H2 OPAL Outdoor Enclosure  Sampling Services See all Sampling Services