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Oxygen Bulk Gas Purifier - PS6
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| PS6 CATALYTIC/ADSORBER OXYGEN PURIFIER |
The MegaTorr® MGT Series Oxygen Gas Purifiers are enhanced, optimized designs providing sub-ppb performance in small footprints. SAES Pure Gas has drawn on years of experience in Ultra-High Purity (UHP) piping design, advanced process material analysis, and state of the art integrated control systems to develop this family of purifiers to meet the needs of low capital cost, high reliability and high performance. The PS6 series uses catalytic and adsorption processes designed specifically to provide ultra-high purity gas for semiconductor applications. Outlet impurity levels for CO, CO2, CH4, H2, and H2O are reduced to below parts per billion (ppb) levels.
Hydrocarbons (CH4), CO and H2 react at elevated temperatures with O2 in the oxidizing catalyst vessel to form CO2 and H2O which are then removed in the ambient temperature downstream adsorber vessels. Adsorber vessels alternate between purify and regeneration modes, providing continuous purification. Adsorber regeneration is accomplished by backflushing with purified oxygen at elevated temperatures. |
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STANDARD FEATURES
- Automated Microprocessor Controller
- HMI (Human Machine Interface)
- System Alarms
- Gas to Gas Heat Exchanger
- Electric Gas Preheaters
- Closed-Loop Temperature Controls
- All Metal Cabinet with Doors
CUSTOMER INTERFACE CONNECTIONS
- Alarm Relay - fail safe relay contacts allow remote detection of alarm condition.
- Remote Contact Shutdown - allows remote shutdown of the purifier.
OPTIONAL EQUIPMENT
- Inlet & Outlet Isolation Valves
- Mass flow meter with 4-20mA Output
- Inlet & Outlet Pressure Transducers
- Instrument Air Management System
- Air Cooled Heat Exchanger
- High Temperature Hardware Interlock
- Over Pressurization Safety Relief System
- Auto or Manual Bypass
- Particle Filter
- Separate Control Power
- MODBUS Data Communication Port
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PS6 Performance |
| Gas Purified |
Impurities Removed |
Outlet Performance |
| O2 |
H2O, CO, CO2, H2, CH4 |
< 1 ppb |
| Note: Purifiers are gas specific and should only be used for the gas indicated | |
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PS6 Specifications |
| Model |
Maximum Flow (Nm3/hr) |
Average Power Consumption (kW) |
Maximum Pressure Drop (bar) |
Dimensions (cm) |
Weight (kg) |
| H |
W |
D |
| PS6-MGT15-O |
15 |
1.4 |
0.7 |
193 |
89 |
84 |
600 |
| PS6-MGT30-O |
30 |
2.3 |
0.7 |
193 |
89 |
84 |
600 |
| PS6-MGT60-O |
60 |
3.2 |
0.7 |
193 |
89 |
84 |
600 |
| PS6-MGT100-O |
100 |
5.9 |
0.7 |
193 |
132 |
135 |
1700 |
| PS6-MGT200-O |
200 |
9.1 |
0.7 |
193 |
132 |
135 |
1700 | |
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| Bulk Gas |
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| Auto-Regenerable |
| CDA |
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 Removes H2O, CO2, TOC, Acids, Bases, Refractory, Compounds
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Nitrogen |
| Removes H2O, CO, CO2, O2, H2 |
| Removes H2O, CO, CO2, O2, H2, CH4 |
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Rare Gas |
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Removes H2O, CO, CO2, O2, H2, CH4, N2 |
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Hydrogen |
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Removes H2O, CO, CO2, O2, NMHC |
| Removes H2O, CO, CO2, O2, NMHC, CH4, N2 [5N Quality Gas] |
| Removes H2O, CO, CO2, O2, NMHC, CH4, N2 [6N Quality Gas] |
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Oxygen |
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Removes H2O, CO, CO2, H2, CH4 |
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| Ammonia |
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Removes H2O, O2 |
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Factory Regenerable |
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CDA, Nitrogen, Rare Gas, Hydrogen, Oxygen |
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Removes H2O, CO, CO2, O2, H2 |
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| OPAL Outdoor Enclosure |
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