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CDA (Clean Dry Air) Bulk Gas Purifier - PS22
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The PS22 Series Gas Purifiers are enhanced, optimized designs providing sub-ppb performance. SAES Pure Gas has drawn on years of experience in Ultra-High Purity (UHP) piping design, advanced process material analysis and state of the art integrated control systems to develop this family of purifiers to meet the needs of low capital cost, high reliability and high performance.
The PS22 series uses ambient temperature adsorption processes designed specifically to provide UHP gas for semiconductor applications. Outlet impurity levels for CO2, H2O and trace impurities including TOC’s (C7+), amines, ammonia, siloxanes, sulfurs, refractory compounds, phthalates, carboxylic acids and NOx, are reduced to below parts per billion (ppb) levels.
The risk of impurity breakthrough is minimized when using a regenerable, "self-cleaning" purifier, like the PS22, as opposed to a disposable, "fixed capacity" canister. Experience has shown that inlet impurities found in CDA, for example, can vary greatly depending on ambient atmospheric conditions. |
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STANDARD FEATURES
- Auto regenerable
- HMI touch screen display
- Fully automated microprocessor controller
- Flow rates available: 5 Nm3/hr – 10,000 Nm3/hr
GASES PURIFIED
- CDA
- Nitrogen
- Oxygen
- Inerts and O2/inert mixtures
PERFORMANCE
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Removes H2O, CO2, TOCs, Acids, Bases, and trace impurities
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< 10 ppt performance
AVAILABLE OPTIONS
- High Temperature Hardware Interlock for over-temperature protection independent of the control system.
- Auto or Manual Bypass allows process gas flow to bypass the purifier vessels.
- Particle Filter provides purified gas filtration using a TFE or metal element.
- MODBUS Data Communication Port provides operational data output.
- Ground Fault Protection (GFI) provides protection from electrical ground fault.
- Emergency Off (EMO) Button provides control for an emergency stop.
- Purifier Hold Down Brackets provide means for securing purifier to floor or wall.
- Separate Control Power allows purifier control power by customer UPS separate from main purifier power.
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| PS22 Performance |
| Gas Purified |
Impurities Removed |
Outlet Performance |
| CDA |
H2O, CO2 |
< 100 ppt |
| TOC, Acids, Bases, Refractory Compounds |
< 10 ppt |
| Note: Purifiers are gas specific and should only be used for the gas indicated | |
| PS22 Specifications |
| Model |
Maximum Flow (Nm3/hr) |
Average Power Consumption (kW) |
Maximum Pressure Drop (bar) |
Dimensions (cm) |
Weight (kg) |
| H |
W |
D |
| PS22-MGT5-CDA |
5 |
0.2 |
0.7 |
86 |
53 |
30 |
48 |
| PS22-MGT10-CDA |
10 |
0.2 |
0.7 |
86 |
53 |
30 |
48 |
| PS22-MGT20-CDA |
20 |
0.3 |
1 |
135 |
84 |
41 |
100 |
| PS22-MGT25-CDA |
25 |
0.3 |
1 |
135 |
84 |
41 |
100 |
| PS22-MGT30-CDA |
30 |
0.4 |
1 |
135 |
84 |
41 |
110 |
| PS22-MGT40-CDA |
40 |
0.4 |
1 |
135 |
84 |
41 |
110 |
| PS22-MGT60-CDA |
60 |
0.5 |
1 |
150 |
84 |
41 |
120 |
| PS22-MGT100-CDA |
100 |
0.5 |
1 |
196 |
132 |
135 |
1500 |
| PS22-MGT150-CDA |
150 |
0.5 |
0.7 |
193 |
132 |
135 |
1500 |
| PS22-MGT200-CDA |
200 |
0.5 |
0.7 |
193 |
132 |
135 |
1500 |
| PS22-MGT300-CDA |
300 |
0.5 |
0.7 |
193 |
132 |
135 |
1500 |
| PS22-MGT600-CDA |
600 |
1 |
1 |
209 |
148 |
196 |
3000 |
| PS22-MGT1000-CDA |
1000 |
0.7 |
0.7 |
239 |
191 |
236 |
2300 |
| PS22-MGT1200-CDA |
1200 |
1 |
0.7 |
239 |
191 |
236 |
2300 |
| PS22-MGT1500-CDA |
1500 |
1.5 |
0.7 |
239 |
191 |
236 |
2500 |
| PS22-MGT1800-CDA |
1800 |
1.5 |
0.7 |
239 |
191 |
236 |
2500 |
| PS22-MGT2000-CDA |
2000 |
1.5 |
1 |
264 |
252 |
262 |
5000 |
| PS22-MGT3000-CDA |
3000 |
2 |
1 |
264 |
252 |
262 |
5600 |
| PS22-MGT3500-CDA |
3500 |
2 |
1 |
264 |
252 |
262 |
5600 |
| PS22-MGT4000-CDA |
4000 |
2 |
1 |
264 |
252 |
262 |
5600 |
| PS22-MGT5000-CDA |
5000 |
2 |
1 |
264 |
252 |
262 |
5600 |
| PS22-MGT6000-CDA |
6000 |
3 |
1 |
267 |
252 |
467 |
10500 |
| PS22-MGT8000-CDA |
8000 |
3 |
1 |
267 |
252 |
467 |
12000 |
| PS22-MGT9000-CDA |
9000 |
4 |
1 |
267 |
252 |
467 |
12000 |
| PS22-MGT10000-CDA |
10000 |
4 |
1 |
267 |
252 |
467 |
12000 | |
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PS22-MGT30 CDA Purifier |
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| Bulk Gas |
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| Auto-Regenerable |
| CDA |
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 Removes H2O, CO2, TOC, Acids, Bases, Refractory, Compounds
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Nitrogen |
| Removes H2O, CO, CO2, O2, H2 |
| Removes H2O, CO, CO2, O2, H2, CH4 |
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Rare Gas |
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Removes H2O, CO, CO2, O2, H2, CH4, N2 |
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Hydrogen |
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Removes H2O, CO, CO2, O2, NMHC |
| Removes H2O, CO, CO2, O2, NMHC, CH4, N2 [5N Quality Gas] |
| Removes H2O, CO, CO2, O2, NMHC, CH4, N2 [6N Quality Gas] |
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Oxygen |
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Removes H2O, CO, CO2, H2, CH4 |
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| Ammonia |
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Removes H2O, O2 |
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Factory Regenerable |
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CDA, Nitrogen, Rare Gas, Hydrogen, Oxygen |
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Removes H2O, CO, CO2, O2, H2 |
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| OPAL Outdoor Enclosure |
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