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Arsine/Phosphine Gas Purification
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Arsine or Phosphine Gas Ambient Temperature Purification |
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Impurities removed include H2O, and O2. Impurities in these gases are reduced to less than 1 part-per-billion.
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To select a Purifier:
Please choose a model size, media, and optional equipment
Example part number MC50-502FV
Part number breakdown |
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Media Type for Arsine/Phosphine Gas
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Media |
Gases Purified |
Impurities Removed |
Outlet Performance |
Regenerable |
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502 |
AsH3, PH3 |
H2O, O2 |
< 1 ppb |
NO | |
Options
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Option |
Description |
Comments |
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F |
0.003 µm filter option |
2 µm filter standard |
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V |
Inlet and outlet valves |
1/4" Manual diaphragm. (Not available on SP models.) |
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Notes:
1. Flowrates stated without optional filters or valves
2. PG1 come standard with .003 µm filter and valves (see datasheet).
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