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SAES Pure Gas Announces the introduction of Microcontamination Inspection Service including the new compact CollectTorr® sampling system.
San Luis Obispo, CA – September 10, 2007 – SAES Pure Gas Inc, a world leader and supplier of gas purification technology equipment to the semiconductor and other industries announced today the introduction of a new state-of-the-art Microcontamination Inspection Services which includes the unique “in-situ” CollectTorr sampling system. The CollectTorr system, defined by its compact design, reliability and simple one connection installation process, is new analytical tool for optics purge gas certification.
This advanced lithography and inspection/ metrology purge gases certification system is nicely complemented and accompanied by an off-line analytical service from SAES Pure Gas, with parts per trillion (pptV) levels assessment of molecular acids, bases, refractory and organic contaminants being successfully achieved.
Field installation times average about 10 minutes with a collection/sampling period of 24 hours. Clients can expect a user friendly Analytical Certification Report from SAES Pure Gas 5 working days from the date of receipt at SAES laboratory. SAES Pure Gas analytical sampling, analysis and certification are compliant with lithography and inspection/ metrology tool optics warranty certification and can include contamination root cause analysis upon request.
Client application of the CollectTorr sampling system can include one or all of the following areas; pre/ post purification molecular contamination level assessment, gas piping and component outgassing surveys, as well as lithography and inspection/ metrology tool manufacturer purge gases certification for optics and lenses warranty.
About the SAES Getters Group
Pioneering the development of the getter technology, SAES Getters Group is the world leader in a variety of scientific and industrial applications where stringent vacuum conditions or ultra high pure gases are required. For the last 60 years, its getter solutions have been supporting technological innovation in the information display and lamp industries, in ultra high vacuum systems, in a wide range of electron device-based applications, and in the vacuum thermal insulation.
The Group also holds a leading position in ultra pure gas handling for the semiconductor and other hi-tech markets with the SAES Pure Gas group.
Starting year 2004, by leveraging on the core competence in special metallurgy and material science, SAES Getters Group expands its business in the advanced material niche markets, with the introduction of the optical crystal product line, for optoelectronic and high-power laser applications, and of the shape memory alloys, for actuators primarily used in the automotive industry.
A total production capacity distributed at 8 manufacturing plants spanning across 3 continents, a 16-facility sales & service network, over 1,000 employees allow the Group to combine multicultural skills and expertise to form a truly global enterprise.
SAES Getters is headquartered in Milan area of Italy, and holds manufacturing plants, sales and service facilities worldwide. SAES Getters has been listed on the Italian Stock Exchange Market since 1986.
SAES Pure Gas Inc.,
SAES Pure Gas, located in San Luis Obispo, CA, is the world leader in scientific and technological applications where very low limits of impurities in gases are mandatory. By exploiting its core competencies, SAES develops ultra pure gas handling equipment for the semiconductor and other high technology markets, supplying gas purifiers for virtually all bulk and specialty gas applications. Leveraging the 20 years experience in the gas purification filed, SAES Pure Gas is also emerging as a key player for the newest semiconductor industry leading edge applications such as: photolithography, metrology and inspection tools optics purge gas.
SAES Pure Gas Inc.
Cristian Landoni
Purification Product Manager
Phone: +39 02 9317 8419
Mobile: +39 346 3794282
E-mail: cristian_landoni@saes-group.com
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