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Ammonia Bulk Gas Purifier - PS21
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| PS21 Ammonia Purifier |
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The MegaTorr® MGT Series Ammonia Purifiers are enhanced, optimized designs providing sub ppb performance in small footprints. SAES Pure Gas has drawn on years of experience in Ultra High Purity piping design, advanced process material analysis, and state of the art integrated control systems to develop this new family of purifiers to meet the needs of low capital cost, high reliability and high performance. The PS21 series uses dual catalytic and adsorption processes, designed specifically to provide ultra-high purity (UHP) gas for semiconductor applications. Outlet impurity levels for H2O and O2 are reduced to below parts per billion (ppb) levels. Adsorber vessels alternate between purify and regeneration mode providing continuous purification in a single process to remove the impurities to sub ppb levels. Adsorber regeneration is accomplished by back-flushing with a mixture of purified nitrogen and low concentration hydrogen at an elevated temperature. The regenerated vessel is then reconditioned with NH3 prior to placing it back into service.
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| Features |
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Standard Features
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Fully Automated Microprocessor Controller
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HMI (Human Machine Interface)
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Electric Gas Preheaters
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Ammonia Detection Sensor
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Vented Cabinet Purge
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Closed-Loop Temperature Controls
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Remote Contact Shutdown
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All Metal Enclosure with Doors
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Regeneration Blending Station
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Air Cooled Heat Exchanger
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Over Pressurization Safety System
Optional Equipment
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Inlet and outlet isolation valves
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Inlet Mass Flow Meter with 4–20 mA Isolated Analog Output
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Inlet and Outlet Pressure Transducers w/4–20 mA Isolated Analog Output
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High Temperature Hardware Interlock
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Auto or Manual Bypass.
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Particle Filter • Separate Control Power
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MODBUS Data communication port
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Ground Fault Protection (GFI)
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Emergency Off (EMO) Button
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Purifier Hold Down Brackets
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Uninterruptible Power Supply (UPS)
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CE Marking |
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PS21 Performance |
| Gas Purified |
Impurities Removed |
Outlet Performance |
| NH3 |
H2O, O2 |
< 1 ppb |
| Note: Purifiers are gas specific and should only be used for the gas indicated | |
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PS21 Specifications |
| Model |
Maximum Flow (Nm3/hr) |
Average Power Consumption (W) |
Maximum Pressure Drop (bar) |
Dimensions (cm) |
Weight (kg) |
| H |
W |
D |
| PS21-MGT20-NH3 |
20 |
200 |
0.7 |
196 |
89 |
86 |
500 |
| PS21-MGT40-NH3 |
40 |
500 |
0.7 |
196 |
89 |
86 |
500 | |
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| Bulk Gas |
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| Auto-Regenerable |
| CDA |
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Removes H2O, CO2, TOC, Acids, Bases, Refractory, Compounds
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Nitrogen |
Removes H2O, CO, CO2, O2, H2 |
Removes H2O, CO, CO2, O2, H2, CH4 |
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Rare Gas |
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Removes H2O, CO, CO2, O2, H2, CH4, N2
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Hydrogen |
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Removes H2O, CO, CO2, O2, NMHC
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Removes H2O, CO, CO2, O2, NMHC, CH4, N2 [5N Quality Gas] |
Removes H2O, CO, CO2, O2, NMHC, CH4, N2 [6N Quality Gas] |
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Oxygen |
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Removes H2O, CO, CO2, H2, CH4
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| Ammonia |
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Removes H2O, O2
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Factory Regenerable |
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CDA, Nitrogen, Rare Gas, Hydrogen, Oxygen |
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Removes H2O, CO, CO2, O2, H2
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| OPAL Outdoor Enclosure |
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