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The unique solid-state sampling system and off-line analytical service from SAES Pure Gas have been developed to provide end-users of leading edge lithography and inspection/metrology equipment with a dedicated, simple, and reliable tool for chemical filter certification and cleanroom air certification.
Utilizing the solid-state traps the CollectTorr Sampling System can measure parts per trillion (pptV) levels molecular acids, bases, refractory and organic contaminants.
SAES Pure Gas analytical sampling, analysis and certification are compliant with lithography and inspection/ metrology tool optics warranty certification requirements.
If you are looking for a Sampling system for pressurized gases such as Nitrogen, Compressed Dry Air (CDA), Hydrogen, or Rare Gases (Argon, Helium, etc) please click here.
 Brochure (635.81 KB)
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Service Features
• Sampled Gases include: Ambient Air, Cleanroom Air
• Part-per-trillion volume sensitivity
• Molecular contaminant analysis and speciation include:
▫ Inorganic Acids (Fluoride, Chloride, Nitrite, Nitrate, Sulphate, Sulphite, Bromide)
▫ Bases (Ammonia, Amines)
▫ Hydrocarbons (condensables, volatile organics)
▫ Refractory compounds (Si, P, S and Halogenated-organics) |
Benefits
• No liquid impingers are required
• Compact design: easy to install, operate and ship
• Single sample connection for complete molecular contamination assessment allows for minimum connection downtime
• Solid-state trap sampling allows for any mounting orientation (with in-tool installation possible)
SAES Pure Gas Added Value
• State-of-the-art analytical laboratory
• Quick analysis turnaround time
• User-friendly analytical report
• Contamination root cause analysis available
• 20 years expertise in purification solutions
Applications
• Lithography and inspection/metrology tool manufacturer purge gas certification for optics and lense warranty
• Pre/Post Purification Molecular Contamination Level measurement
• Cleanroom and chemical filter certification
• Gas Piping and component outgassing validation
Facility Requirements
• No utilities required
Logistics/Sampling Steps
1. SAES Pure Gas ships the Ambient Air CollectTorr unit
2. Place CollectTorr in test area and sample.
3. After sampling is complete send to SAES Pure Gas Analytical Department.
4. Analytical Certification Report will be delivered within 5 business days after receipt at SAES laboratory.
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Speciation and Typical Sensitivity (based on 24 hour sampling)
| Detected Contaminants |
Ambient Air CollectTorr |
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DL (ng) |
DL (ng/l) |
DL (ppbV) |
| Fluoride (F-) |
20 |
0.06 |
0.071 |
| Chloride (Cl-) |
50 |
0.14 |
0.096 |
| Nitrite (NO2-) |
25 |
0.07 |
0.037 |
| Bromide (Br-) |
20 |
0.06 |
0.017 |
| Nitrate (NO3-) |
50 |
0.14 |
0.055 |
| Sulphate (SO4=) |
50 |
0.09 |
0.023 |
| Ammonium (NH4+) |
25 |
0.07 |
0.100 |
| HCs (C6-C30 as Toluene) |
1 |
0.03 |
0.007 |
| Refractories (as HMDSO) |
1 |
0.03 |
0.007 | |
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