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  Part Number Example-MicroTorr

 


  Point of Use

MicroTorr

 Rare Gases & Nitrogen 

 Hydrogen

 Clean Dry Air (CDA) & Oxygen

 Dryer (H2O Removal)

 Weld & Purge Gases 

 Corrosive & Specialty Gases

 Ammonia & DMHz

 Carbon Dioxide, Acetylene

 Arsine/Phosphine

 
 Purifier Lifetime
 Regeneration Services
 

MonoTorr - Nitrogen / Methane removal

 Rare Gas, Nitrogen
[Max. 200 sccm]
 Rare Gas, Nitrogen
[Max. 5 slpm]
 Rare Gas, Nitrogen, Hydrogen [Max. 75 slpm]

 Rare Gas, Nitrogen, Hydrogen [Max. 150 slpm]

 Oxygen, CDA
[Max. 100 slpm]



 Bulk Gas

See all Bulk Gas Products



 Sampling Services
See all Sampling Services