Gas Purifiers
SAES Pure Gas is the largest global supplier of bulk and point-of-use gas purifiers for a wide range of gases. We manufacture gas purification systems for use at leading worldwide semiconductor fabs. These purifiers provide parts-per-trillion gas purity for use in manufacturing of semiconductors, display, LED and solar products.
For more information on our Gas Purifiers, select the appropriate gas below:
| Nitrogen |
| Hydrogen |
| Ammonia |
| CDA (Clean Dry Air) |
| Helium |
| Argon |
| Oxygen |
| Carbon Dioxide |
| Other Gases |
These Gas Purifiers for point-of-use and bulk applications are available for most inert and specialty gases.
- Bulk Gas Purifiers include the MegaTorr product line, which is available for flows from 166 slpm (10 Nm3/hr) to over 333,333 slpm (20,000 Nm3/hr).
- Point-of-use purifiers include MonoTorr heated getter purifiers for point-of-use applications to purify nitrogen, argon, helium and other rare gases. Also, MicroTorr ambient temperature purifiers are intended for inert gases, specialty gases and CDA (Clean Dry Air) at any flow rate.
