Arsine or Phosphine Gas Purification
Impurities removed include H2O, and O2. Impurities in these gases are reduced to less than 1 part-per-billion.
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- Purifier Lifetime
- SDS
- Bypass / Piping Manifolds
To select a purifier please choose: |
Part Number Example |
| 1. Model Size | MC1 |
| 2. Purification Media | -202 |
| 3. Options (F = 0.003µm Particle Filter or V = Inlet/Outlet Isolation Valves) | FV |
| Part number breakdown |
| Model | Average Flow(slpm) For lifetime guidance |
Max Flow(slpm) | Max Pressure(psig) | Drawing |
| MC1 | 0.8 | 1 | 1,000 | Drawing |
| MC45 | 2 | 4 | 1,000 | Drawing |
| MC50 | 2 | 4 | 1,000 | Drawing |
| MC190 | 7 | 14 | 250 | Drawing |
| MC200 | 5 | 10 | 250 | Drawing |
| MC400 | 15 | 32 | 250 | Drawing |
| MC450 | 10 | 28 | 250 | Drawing |
| MC500 | 12 | 20 | 250 | Drawing |
| MC700 | 25 | 45 | 250 | Drawing |
| MC1500 | 40 | 70 | 250 | Drawing |
| MC3000 | 80 | 125 | 250 | Drawing |
| Special 'U' shaped Manifold | ||||
| PG1 | 7 | 14 | 250 | Drawing |
| Media | Gases Purified | Impurities removed | Regenerable | Specification |
| 502 | PH3, AsH3 | H2O, O2 to < 1 ppb Metals < 1 ppbV |
No | Specification |
| Option | Description | Comments |
| F | 0.003 µm Particle Filter option | If not ordered, 2 µm filter standard |
| V | Inlet and outlet valves | 1/4" or 1/2" Manual diaphragm Valves |
