MicroTorr Purification Media
The following is the complete list of all purification media's available in the MicroTorr Ambient Temperature Purifier line:
| Media | Gases Purified | Impurities removed | Regenerable |
| 202 | CDA, O2, N2, Ar, He, Kr, Ne, Xe, H2, D2, CO2, N2O, NO, CF4 | H2O < 1ppb | Yes |
| 203 | CDA, O2, N2, Ar, He, Kr, Ne, Xe, H2, D2, N2O, NO, CF4 | H2O, CO2 < 100 ppt Volatile Acids, Organics, Refractory compounds < 1 ppt Volatile Bases < 5 ppt Metals < 1 ppb |
Yes |
| 302 | HCl, Cl2, B2H6, BCl3, CClH3, GeCl4, GeH4, H2S, H2Se, HBr, NF3, SiCl4, SiF4, SiH2Cl2, SiHCl3, SO2, CHClF2, BF3, | H2O < 1 ppb Metals < 1 ppb |
No |
| 403 | N2, Ar, He, Kr, Ne, Xe, H2, CDA, O2 | Volatile Acids, Organics, Refractory compounds < 1 ppt Volatile Bases < 5 ppt Metals < 1 ppb |
No |
| 404 | N2, Ar, He, Kr, Ne, Xe, H2, CDA, O2, CO2, C2H2, C3H6, C2H4, NH3, C2H6, C3H8, C4H10 | Organics < 1 ppt Metals < 1 ppb |
Yes |
| 502 | PH3, AsH3 | H2O, O2 < 1 ppb Metals < 1 ppb |
No |
| 503 | H2 with up to 1% O2 O2 with up to 2% H2 |
O2 < 1 ppm [in H2 gas] H2 < 1 ppm [in O2 gas] |
N/A |
| 602 | CO | H2O, O2, CO2, Acids, Bases, Organics, Refractories < 1 ppb | No |
| 702 | NH3, C2H7N, C2H8N2, C2H4, C3H6, CH3SiH3, GeH4, SF6, H2/SiH4 mixtures | H2O, O2, CO2, Metals < 1ppb | Yes |
| 802 | SiH4 | H2O, O2, CO, CO2, NMHCs, Sulfur Compounds < 1 ppb | No |
| 804 | CO2 | H2O, O2, CO, H2 < 100 ppt Volatile Acids, Organics, Refractory compounds < 1 ppt Volatile Bases < 5 ppt Metals < 1 ppb |
Yes |
| 805 | CO2 | H2O < 100 ppt Volatile Acids, Organics, Refractory compounds < 1 ppt Volatile Bases < 5 ppt Metals < 1 ppb |
Yes |
| 902 | N2, Ar, He, Kr, Ne, Xe, CH4, C2H6, C3H8, C4H10, SF6, Fluorocarbons | H2O, CO, CO2, O2, H2 < 100 ppt Volatile Acids, Organics, Refractory compounds < 1 ppt Volatile Bases < 5 ppt Metals < 1 ppb |
Yes |
| 904 | H2, D2, H2/Inert Gas mixtures | H2O, O2, CO, CO2 < 100 ppt Volatile Acids, Organics, Refractory Compounds < 1 ppt Volatile Bases < 5 ppt Metals < 1 ppb |
Yes |
| 906 | CDA, O2, N2O | H2O, CO, CO2, NMHCs < 1 ppb Metals < 1 ppb |
Yes |
